TY - JOUR AU - Nam, Nguyen Linh PY - 2020/04/30 TI - High performance trilayer MoS2 photodetector JF - Journal of Science and Technology: Issue on Information and Communications Technology; Vol 18 No 4.2 (2020): Volume 18, Number 4.2, 2020DO - 10.31130/ict-ud.2020.89 KW - N2 - The two-dimensional molybdenum disulfide (MoS 2 ) material has attracted a lot of attention and research recently because of the outstanding properties including layer-strutured semiconductor material and a direct band gap. These properties make MoS 2 to be great potential for application in electronics and optoelectronics. In this study, we fabricated and measured a photodetector made of trilayer MoS 2 materials based on nanopore structure devices. The highly crystalline trilayer MoS 2 films were synthesized and placed on top of the nanopore. The aluminum metal is then evaporated and contacted to both sides of this MoS 2 film to form electrodes for conductivity measurement. The measured vertical trilayer MoS 2 photodetector exhibited high photoresponsivity and photogain of about 10 5 A/W and 10 5 , respectively. It is also found that the photo switching of photodetector is stable and reproducible with fast rise and decay times in milisecond scale. These characteristics make few-layer MoS 2 device to work as optical switches for optoelectronic applications. UR - http://ict.jst.udn.vn/index.php/jst/article/view/89